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Conferences

CD Reference Materials for Sub-Tenth Micrometer Applications

Author(s)
Michael W. Cresswell, E. Hal Bogardus, Joaquin (. Martinez, Marylyn H. Bennett, Richard A. Allen, William F. Guthrie, Christine E. Murabito, B A. am Ende, Loren W. Linholm
Prototype linewidth reference materials with Critical Dimensions (CDs) as narrow as 70 nm have been patterned in (110) silicon-on-insulator films. The sidewalls...

The NIST Microforce Realization and Measurement Project

Author(s)
David B. Newell, Jon R. Pratt, John A. Kramar, Douglas T. Smith, Edwin R. Williams
The National Institute of Standards and Technology (NIST) has launched a five-year Microforce Realization and Measurement project focusing on the development of...

Improved 1 kHz Capacitance Calibration Uncertainty

Author(s)
Anne-Marie Jeffery, Andrew D. Koffman
Uncertainties for 1 kHz capacitance calibrations have been decreased at the National Institute of Standards and Technology (NIST). The improvements are based on...

NIST's High-Speed Pulse Parameter Measurement Service

Author(s)
Nicholas Paulter, Donald R. Larson
The National Institute of Standards and Technology (NIST) provides a me surement service, number 65200S, "Fast Repetitive Pulse Transition Parameters," for...

Bounds on Permittivity Calculations using a TE01δ Dielectric Resonator

Author(s)
Jerzy Krupka, Kristof Derzakowski, Billy F. Riddle, James R. Baker-Jarvis, Robert N. Clarke, A. Abramowicz, O. C. Rochard
The use of both mode-matching and Rayleigh-Ritz numerical techniques for complex permittivity calculations using a TE 01δ mode dielectric resonator allows the...

Fundamentals of Display Metrology

Author(s)
Edward F. Kelley
Display metrology is discussed as applied to electronic displays and especially flat panel displays (FPDs). Topics include the importance of proper set up...
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