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New Developments in Excimer Laser Metrology at 157 and 193 nm
Published
Author(s)
Marla L. Dowell, Richard D. Jones, Holger Laabs, Christopher L. Cromer
Abstract
Abstract for oral presentation on NIST 157 nm laser measurement facility.
Proceedings Title
Proc., Intl. Symp. on 157 nm Laser Measurements
Conference Dates
October 3-4, 2001
Conference Location
Ft. Lauderdale, FL, USA
Pub Type
Conferences
Keywords
laser measurements, lithography
Citation
Dowell, M.
, Jones, R.
, Laabs, H.
and Cromer, C.
(2002),
New Developments in Excimer Laser Metrology at 157 and 193 nm, Proc., Intl. Symp. on 157 nm Laser Measurements, Ft. Lauderdale, FL, USA
(Accessed October 13, 2025)