The 6-Degree of Freedom Tri-Stage Micro Positioner (6DFTSMP) can generate high accuracy, small displacement, and high-resolution motions. The moving platform of the device has six degrees (6-D) of freedom motions (translation and rotation about three orthogonal axes, X-Y-Z). The 6DFTSMP is unique because it derives its input motion from a monolithic tri-stage base plate and has struts that may have specially designed flexures. The 6DFTSMP capitalizes on the availability of inexpensive high quality planar micro-positioning stages for the control of its moving platform. Because the struts, which connect the planar micro positioning stages with the moving platform are oriented in a parallel mechanism fashion the in plane motion of the stages is converted into a translation and rotation about three orthogonal axes. Two experimental prototypes of the 6DFTSMP have been built and various mathematical models have been developed. A micro-position and orientation measurement sensor nest has been developed, which will be used to test various calibration and performance testing methods for this type of micro-positioners.
Spring 2002 Workshop on Optical MicroElectroMechanical Systems and Reliability
April 12-13, 2002
MEMS Technologies in Special Topics: Optics and Reliability
and Amatucci, E.
6-Degree of Freedom Tri-Stage Micro Positioner, Spring 2002 Workshop on Optical MicroElectroMechanical Systems and Reliability
(Accessed December 10, 2023)