@conference{190316,
  author = {Nicholas Dagalakis and E Amatucci},
  title = {6-Degree of Freedom Tri-Stage Micro Positioner},
  year = {2002},
  month = {2002-04-01},
  publisher = {Spring 2002 Workshop on Optical MicroElectroMechanical Systems and Reliability},
  language = {en},
}