TY  - CONF
AU  - Nicholas Dagalakis
AU  - E Amatucci
C2  - Spring 2002 Workshop on Optical MicroElectroMechanical Systems and Reliability
DA  - 2002-04-01
LA  - en
PB  - Spring 2002 Workshop on Optical MicroElectroMechanical Systems and Reliability
PY  - 2002
TI  - 6-Degree of Freedom Tri-Stage Micro Positioner
ER  -