Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Parallel Cantilever Biaxial Micro-Positioner

Published

Author(s)

E Amatucci, Nicholas Dagalakis

Abstract

The Parallel Cantilever Biaxial Micro-Positioner (PCBMP) has a novel configuration and design in that it has two parallel sets of cantilever beam flexures. This design reduces crosstalk in the X and Y translations and creates motions that are more linear and independent from each other in the X and Y directions. The PCBMP comes in two flavors, which are explained in this brief paper.
Proceedings Title
Posted at the MicroElectroMechanical Systems (MEMS) Special Topics Symposium
Conference Dates
April 12, 2002
Conference Location
Laurel , MD, USA
Conference Title
MicroElectroMechanical Systems

Keywords

Performance, Planar Micro-positioner

Citation

Amatucci, E. and Dagalakis, N. (2002), Parallel Cantilever Biaxial Micro-Positioner, Posted at the MicroElectroMechanical Systems (MEMS) Special Topics Symposium, Laurel , MD, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821732 (Accessed March 2, 2024)
Created April 11, 2002, Updated October 12, 2021