Amatucci, E.
and Dagalakis, N.
(2002),
Parallel Cantilever Biaxial Micro-Positioner, Posted at the MicroElectroMechanical Systems (MEMS) Special Topics Symposium, Laurel , MD, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821732
(Accessed April 26, 2024)
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Parallel Cantilever Biaxial Micro-Positioner
Published
Author(s)
E Amatucci,
Abstract
The Parallel Cantilever Biaxial Micro-Positioner (PCBMP) has a novel configuration and design in that it has two parallel sets of cantilever beam flexures. This design reduces crosstalk in the X and Y translations and creates motions that are more linear and independent from each other in the X and Y directions. The PCBMP comes in two flavors, which are explained in this brief paper.Proceedings Title
Posted at the MicroElectroMechanical Systems (MEMS) Special Topics Symposium
Conference Dates
April 12, 2002
Conference Location
Laurel , MD, USA
Conference Title
MicroElectroMechanical Systems
Pub Type
Conferences
Download Paper
Keywords
Performance, Planar Micro-positioner
Citation
Created April 11, 2002, Updated October 12, 2021