@conference{775306,
  author = {E Amatucci and Nicholas Dagalakis},
  title = {Parallel Cantilever Biaxial Micro-Positioner},
  year = {2002},
  month = {2002-04-12 00:04:00},
  publisher = {Posted at the MicroElectroMechanical Systems (MEMS) Special Topics Symposium, Laurel , MD, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821732},
  language = {en},
}