TY  - CONF
AU  - E Amatucci
AU  - Nicholas Dagalakis
C2  - Posted at the MicroElectroMechanical Systems (MEMS) Special Topics Symposium, Laurel , MD, USA
DA  - 2002-04-12 00:04:00
LA  - en
PB  - Posted at the MicroElectroMechanical Systems (MEMS) Special Topics Symposium, Laurel , MD, USA
PY  - 2002
TI  - Parallel Cantilever Biaxial Micro-Positioner
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821732
ER  -