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Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis

Published

Author(s)

B A. am Ende, Michael W. Cresswell, Richard A. Allen, T J. Headley, William F. Guthrie, Loren W. Linholm, E. Hal Bogardus, Christine E. Murabito
Proceedings Title
Proc., 2002 ICMTS
Volume
15
Conference Dates
April 8-11, 2002
Conference Location
Cork, US
Conference Title
IEEE 2002 International Conference on Microelectronic Test Structures

Citation

Am ende, B. , Cresswell, M. , Allen, R. , Headley, T. , Guthrie, W. , Linholm, L. , Bogardus, E. and Murabito, C. (2002), Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis, Proc., 2002 ICMTS, Cork, US (Accessed May 29, 2024)

Issues

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Created March 31, 2002, Updated October 12, 2021