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Surface and Interface Metrology Group

Establishes best-in-the-world SI-traceable length metrology for 3D nanostructures using high-throughput, non-destructive measurement methods. Provides measurement solutions for defect and dimensional metrology needs.

The Surface and Interface Metrology Group works closely with leading U.S. semiconductor manufacturers, nanoelectronics, and metrology tool manufacturers to provide new measurement solutions for critical defect and dimensional metrology needs. We develop the fundamental measurement science and data analysis methods in support of government and U.S. manufacturing where surface roughness, form, and nano-structure topography are critical.

News and Updates

Projects and Programs

Optical scattering from surfaces

We study how material properties, surface topography, and contaminants affect the distribution of light scattered from surfaces. Our aim is to support industry

Reflectance Measurements of Human Skin

The purpose of this human subjects study is to collect high-quality measurements of the reflectance spectrum of human skin and assess the variability across the

Publications

Software

Modeled integrated scatter tool (MIST)

The MIST program has been developed to provide users with a general application to model an integrated scattering system. The program performs an integration of

Tools and Instruments

Transfer spectrophotometer

A Perkin-Elmer Lambda 1050 spectrophotometer is used to complement the reference instruments. It performs this function by measuring samples relative to

Contacts

Group Leader

General Information