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Surface and Interface Metrology Group

Establishes best-in-the-world SI-traceable length metrology for 3D nanostructures using high-throughput, non-destructive measurement methods. Provides measurement solutions for defect and dimensional metrology needs.

The Surface and Interface Metrology Group works closely with leading U.S. semiconductor manufacturers, nanoelectronics, and metrology tool manufacturers to provide new measurement solutions for critical defect and dimensional metrology needs. We develop the fundamental measurement science and data analysis methods in support of government and U.S. manufacturing where surface roughness, form, and nano-structure topography are critical.

News and Updates

Projects and Programs

Reflectance Measurements of Human Skin

The purpose of this human subjects study is to collect high-quality measurements of the reflectance spectrum of human skin and assess the variability across the

Optical grating scatterometry

This program aims to develop standards, methods, and modeling for assessing the periodic structures using optical reflectance and transmittance measurements.

Spectrophotometry

Spectrophotometry is the quantitative measurement of the reflection or transmission properties of a material as a function of wavelength. While relatively

Publications

Index of refraction of germanium

Author(s)
John H. Burnett, Eric C. Benck, Simon G. Kaplan, Erik Stover, Adam Phenis
Measurements of the index of refraction of a sample of high-quality, single-crystal germanium using the minimum deviation refractometry method are presented for

NIST Ballistics Toolmark Research Database

Author(s)
Xiaoyu A. Zheng, Johannes A. Soons, Robert M. Thompson, Sushama P. Singh, Cerasela Constantin
In 2009, a report by the National Academies called into question, amongst other issues, the objectivity of visual toolmark identification by firearms examiners

Software

Modeled integrated scatter tool (MIST)

The MIST program has been developed to provide users with a general application to model an integrated scattering system. The program performs an integration of

Tools and Instruments

Transfer spectrophotometer

A Perkin-Elmer Lambda 1050 spectrophotometer is used to complement the reference instruments. It performs this function by measuring samples relative to

Awards

Contacts

Group Leader

General Information