Improving CD-AFM Measurements from the Tip Down
The group mission is to maintain the nation scales for the fundamentals optical and topographical properties of surfaces and to advance the state of the art of these measurements. The group works closely with leading U.S. optics manufacturers and metrology instrument manufacturers, government and academic research institutes to provide new measurement solutions for critical needs. We lead national and international documentary standard efforts that prescribe test methods that ensure product quality and enables global trade. Efforts are undertaken in close collaboration with academic researchers, government agencies, and industry, including stakeholders within the aerospace, forensics, defense, semiconductor, precision manufacturing, and remote-sensing communities. The topographical surface efforts realizes and disseminates the SI unit of length for measurements of nanostructure, roughness, waviness, and form for surfaces with vertical dimensions ranging from nanometers to micrometers and horizontal dimensions ranging from micrometers to hundreds of millimeters. Optical properties measurements include index of refraction, surface color and appearance, diffuse and regular transmittance, and diffuse, regular, and angle-resolved surface reflectance.