April 24, 2004
Author(s)
John D. Gillaspy, B Blagojevic, Paul A. Dalgarno, K Fahey, V Kharchenko, J M. Laming, L Logosi, E-O Le Bigot, K Makonyi, L P. Ratliff, E Silver, H. Schnopper, E Takacs, J N. Tan, H Tawara, K Tokesi
After a brief introduction to the NIST EBIT facility, we present the results of three different types of experiments that have been carried out there recently: EUV and visible spectroscopy in support of the microelectronics industry, laboratory