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UTA versus line emission for EUVL: studies on xenon emission at the NIST EBIT

Published

Author(s)

K Fahy, P Dunne, L McKinney, G O'Sullivan, E Sokell, J White, A Aguilar, Joshua M. Pomeroy, Joseph N. Tan, B Blagojevic, E O. LeBigot, John D. Gillaspy
Citation
Journal of Physics D-Applied Physics

Citation

Fahy, K. , Dunne, P. , McKinney, L. , O'Sullivan, G. , Sokell, E. , White, J. , Aguilar, A. , Pomeroy, J. , Tan, J. , Blagojevic, B. , LeBigot, E. and Gillaspy, J. (2004), UTA versus line emission for EUVL: studies on xenon emission at the NIST EBIT, Journal of Physics D-Applied Physics (Accessed April 21, 2024)
Created December 31, 2003, Updated October 12, 2021