Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Potential Energy Sputtering of EUVL Materials, ed. by V. Bakshi

Published

Author(s)

Joshua M. Pomeroy, L P. Ratliff, John D. Gillaspy, Sasa Bajt
Citation
EUV Sources for Lithography
Publisher Info
SPIE Press , Bellingham, WA

Citation

Pomeroy, J. , Ratliff, L. , Gillaspy, J. and Bajt, S. (2006), Potential Energy Sputtering of EUVL Materials, ed. by V. Bakshi, SPIE Press , Bellingham, WA (Accessed July 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2006, Updated February 17, 2017