@book{139686,
  author = {Joshua Pomeroy and L Ratliff and John Gillaspy and Sasa Bajt},
  title = {Potential Energy Sputtering of EUVL Materials, ed. by V. Bakshi},
  year = {2006},
  month = {2006-01-01},
  publisher = { SPIE Press , Bellingham, WA},
  language = {en},
}