Visible, EUV, and X-Ray Spectroscopy at the NIST EBIT Facility

Published

April 24, 2004

Author(s)

John D. Gillaspy, B Blagojevic, Paul A. Dalgarno, K Fahey, V Kharchenko, J M. Laming, L Logosi, E-O Le Bigot, K Makonyi, L P. Ratliff, E Silver, H. Schnopper, E Takacs, J N. Tan, H Tawara, K Tokesi

Abstract

After a brief introduction to the NIST EBIT facility, we present the results of three different types of experiments that have been carried out there recently: EUV and visible spectroscopy in support of the microelectronics industry, laboratory astrophysics using a microcalorimeter, and charge exchange studies using extracted beams of highly charged ions.

Proceedings Title

Proceedings of APS Conference on Atomic Processes in Plasma

Conference Dates

April 19-22, 2004

Conference Title

Atomic Processes in Plasmas

Pub Type

Conferences

Keywords

astrophysics, charge exchange, electron beam ion trap, EUV lithography, exreme ultraviolet, fusion, highly charged ions, microcalorimeter, x-ray

Citation

Gillaspy, J. , Blagojevic, B. , Dalgarno, P. , Fahey, K. , Kharchenko, V. , Laming, J. , Logosi, L. , Le, E. , Makonyi, K. , Ratliff, L. , Silver, E. , Schnopper, H. , Takacs, E. , Tan, J. , Tawara, H. and Tokesi, K. (2004), Visible, EUV, and X-Ray Spectroscopy at the NIST EBIT Facility, Proceedings of APS Conference on Atomic Processes in Plasma (Accessed October 15, 2025)