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Search Publications by: Marla L. Dowell (Fed)

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Displaying 26 - 50 of 50

Nonlinearity of Response of Silicon Photodiodes at 193 nm

May 11, 2005
Author(s)
Shao Yang, Darryl A. Keenan, Marla L. Dowell
We have developed a measurement system based on a correlation method to characterize the nonlinearity response of silicon photodiodes to pulsed-laser radiation at 193 nm. The method compares the pulse response of the device under test with that of a

Measurement of detector nonlinearity at 193 nm

February 20, 2005
Author(s)
Holger Laabs, Darryl A. Keenan, Shao Yang, Marla L. Dowell
We have developed a measurement system based on a correlation method to characterize the nonlinearity of a detector's response over a large range of laser pulse energy. The system consists of an excimer-laser source, beam-shaping optics, a beam splitter, a

Nonlinearity measurement of high power laser detectors at NIST

January 1, 2004
Author(s)
Xiaoyu X. Li, Thomas Scott, Shao Yang, Christopher L. Cromer, Marla L. Dowell
We briefly explain the fundamentals of detector nonlinearity applicable to both electrical and optical nonlinearity measurements. We specifically discuss the attenuation method for optical nonlinearity measurement that the NIST system is based upon, and we

A Primary Standard for 157 nm Excimer Laser Measurements

March 1, 2003
Author(s)
Christopher L. Cromer, Marla L. Dowell, Richard D. Jones, Darryl A. Keenan, Shao Yang
Two primary standard calorimeters have been developed for accurate measurements of 157 nm (F2) excimer laser power and energy. The calorimeter specifications and design are discussed. Results from the construction and testing of the calorimeters, control

A 193 nm Detector Nonlinearity Measurement System at NIST

January 1, 2003
Author(s)
Shao Yang, Darryl A. Keenan, Holger Laabs, Marla L. Dowell
To meet the semiconductor industry's demands for accurate measurements on excimer lasers, we have developed a system using the correlation method to measure the nonlinear response of pulse energy detectors of excimer laser at 193 nm. The response of the

A 193 nm Laser Detector Nonlinearity Measurement System

January 1, 2003
Author(s)
Darryl A. Keenan, Holger Laabs, Shao Yang, Marla L. Dowell
To meet the semiconductor industry's demands for accurate measurements, we have developed a method to characterize the nonlinear response of 193 nm excimer laser detectors. This system is complimentary to our other excimer laser power and energy

Dose Meter Calibration System for 193 nm

May 1, 2002
Author(s)
Holger Laabs, Richard D. Jones, Marla L. Dowell
We have established a measurement system for the direct calibration of energy density (dose) meters. It consists of beam-shaping objects, a beamsplitter, calibrated apertures, a beam profile monitor, an energy monitor, and a transfer standard. The 193 nm

Damage Testing of Partial Reflectors for 157 nm Laser Calorimeters

January 1, 2002
Author(s)
Holger Laabs, Richard D. Jones, Christopher L. Cromer, Marla L. Dowell, V. Liberman
We determined the damage thresholds and lifetimes of several materials using 157 and 193 nm excimer lasers and a beam profile technique similar to that described in ISO 11254-2. We made these measurements to select an appropriate absorbing material for use

New Developments in Excimer Laser Metrology at 157 nm

January 1, 2002
Author(s)
Marla L. Dowell, Richard D. Jones, Holger Laabs, Christopher L. Cromer, R. Morton
We have constructed a prototype calorimeter that will serve as a primary standard for measurements of 157 nm excimer laser power and energy. The construction and performance of the prototype will be discussed. In addition, we have performed a series of

Thermal Response and Inequivalence of Pulsed Ultraviolet-Laser Calorimeters

January 1, 2002
Author(s)
D X. Chen, Marla L. Dowell, Christopher L. Cromer, Nien F. Zhang
A finite element model has been developed to study the thermal response of pulsed-laser calorimeters. Comparisons between pulsed- and average-laser power heating will be shown. Comparisons between laser and electrical heating will be presented and the

Pulsed-Laser Metrology at NIST

February 1, 2001
Author(s)
Marla L. Dowell
Lasers and laser metrology have become an important part of our daily lives. Since the inception of the first operable laser 41 years ago, there has been explosive growth in the number of new applications of laser technology; from supermarket scanners to

New Developments in Deep Ultraviolet Laser Metrology for Photolithography

January 1, 2001
Author(s)
Marla L. Dowell, Christopher L. Cromer, Richard D. Jones, Darryl A. Keenan, Thomas Scott
Current and future laser measurement services at 157, 193, and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented, electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser

New Developments in Deep Ultraviolet Laser Metrology for Photolithography

January 1, 2000
Author(s)
Marla L. Dowell, Christopher L. Cromer, Richard D. Jones, Darryl A. Keenan, Thomas Scott
Current and future laser measurement services at 157, 193, and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented, electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser

Observation of Conical Emission From a Single Self-Trapped Beam

June 1, 1999
Author(s)
B D. Paul, Marla L. Dowell, Alan Gallagher, J W. Cooper
We report observations of conical emission from a pulsed laser beam with incident laser power, detuning, and beam diameter matched to a range of single, steady-state filaments. The beam thus propagates with nearly constant diameter through 5 cm of

Self-focused Light Propagation in a Fully Saturable Medium: Theory

October 1, 1995
Author(s)
Marla L. Dowell, B D. Paul, Alan Gallagher, J W. Cooper
We report observations of self-focusing and filamentation of ~3 ns laser pules in strontium (Sr) vapor. The expermental arrangement consits of a Sr vapor cell and a pulsed Nd:YAG pumped dye laser tuned to the blue of the 461 nm transition in Sr. The