New Developments in Excimer Laser Metrology at 157 nm

Published

January 1, 2002

Author(s)

Marla L. Dowell, Richard D. Jones, Holger Laabs, Christopher L. Cromer, R. Morton

Abstract

We have constructed a prototype calorimeter that will serve as a primary standard for measurements of 157 nm excimer laser power and energy. The construction and performance of the prototype will be discussed. In addition, we have performed a series of thermal characterization measurements on the prototype. From these measurements we deduce that the uncertainty in the prototype's electrical calibration factor is less than 0.2 %. This number is less than or comparable to the uncertainty of the NIST primary standards for use with 193 and 248 nm excimer lasers. The 157 nm standards are part of a beamsplitter-based measurement system for laser power and energy calibrations. To control and determine the ambient measurement conditions, we have constructed a nitrogen-purged enclosure for this system. We are able to achieve O₂ concentrations of less than 3 parts per million (ppm) inside the enclosure.

Proceedings Title

Proc., SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J.C. Herr, Editor

Volume

4689

Conference Dates

March 3-8, 2002

Conference Location

Santa Clara, CA, USA

Pub Type

Conferences

Keywords

ultraviolet laser energy, ultraviolet laser metrology

Citation

Dowell, M. , Jones, R. , Laabs, H. , Cromer, C. and Morton, R. (2002), New Developments in Excimer Laser Metrology at 157 nm, Proc., SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J.C. Herr, Editor, Santa Clara, CA, USA (Accessed April 28, 2024)