@conference{763896,
  author = {Marla Dowell and Richard Jones and Holger Laabs and Christopher Cromer and R. Morton},
  title = {New Developments in Excimer Laser Metrology at 157 nm},
  year = {2002},
  number = {4689},
  month = {2002-01-01 00:01:00},
  publisher = {Proc., SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J.C. Herr, Editor, Santa Clara, CA, USA},
  language = {en},
}