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A Primary Standard for 157 nm Excimer Laser Measurements

Published

Author(s)

Christopher L. Cromer, Marla L. Dowell, Richard D. Jones, Darryl A. Keenan, Shao Yang

Abstract

Two primary standard calorimeters have been developed for accurate measurements of 157 nm (F2) excimer laser power and energy. The calorimeter specifications and design are discussed. Results from the construction and testing of the calorimeters, control electronics, data acquisition, and N2 purge system are presented. These calorimeters have demonstrated a two-fold improvement in sensitivity over existing NIST excimer laser calorimeters. The measurement uncertainty from electrical calibrations is a five-fold improvement over the NIST 193 nm primary standard.
Proceedings Title
AIP Conf. Proc.
Volume
683
Conference Dates
March 25-27, 2003
Conference Location
Austin, TX, USA
Conference Title
2003 Int'l Conf. on Characterization and Metrology for ULSI Tech.

Keywords

ultraviolet laser energy, ultraviolet laser metrology

Citation

Cromer, C. , Dowell, M. , Jones, R. , Keenan, D. and Yang, S. (2003), A Primary Standard for 157 nm Excimer Laser Measurements, AIP Conf. Proc., Austin, TX, USA (Accessed February 29, 2024)
Created February 28, 2003, Updated October 12, 2021