A Primary Standard for 157 nm Excimer Laser Measurements

Published

March 1, 2003

Author(s)

Christopher L. Cromer, Marla L. Dowell, Richard D. Jones, Darryl A. Keenan, Shao Yang

Abstract

Two primary standard calorimeters have been developed for accurate measurements of 157 nm (F2) excimer laser power and energy. The calorimeter specifications and design are discussed. Results from the construction and testing of the calorimeters, control electronics, data acquisition, and N₂ purge system are presented. These calorimeters have demonstrated a two-fold improvement in sensitivity over existing NIST excimer laser calorimeters. The measurement uncertainty from electrical calibrations is a five-fold improvement over the NIST 193 nm primary standard.

Proceedings Title

AIP Conf. Proc.

Volume

683

Conference Dates

March 25-27, 2003

Conference Location

Austin, TX, USA

Conference Title

2003 Int'l Conf. on Characterization and Metrology for ULSI Tech.

Pub Type

Conferences

Keywords

ultraviolet laser energy, ultraviolet laser metrology

Citation

Cromer, C. , Dowell, M. , Jones, R. , Keenan, D. and Yang, S. (2003), A Primary Standard for 157 nm Excimer Laser Measurements, AIP Conf. Proc., Austin, TX, USA (Accessed July 10, 2025)