A Primary Standard for 157 nm Excimer Laser Measurements
Christopher L. Cromer, Marla L. Dowell, Richard D. Jones, Darryl A. Keenan, Shao Yang
Two primary standard calorimeters have been developed for accurate measurements of 157 nm (F2) excimer laser power and energy. The calorimeter specifications and design are discussed. Results from the construction and testing of the calorimeters, control electronics, data acquisition, and N2 purge system are presented. These calorimeters have demonstrated a two-fold improvement in sensitivity over existing NIST excimer laser calorimeters. The measurement uncertainty from electrical calibrations is a five-fold improvement over the NIST 193 nm primary standard.
AIP Conf. Proc.
March 25-27, 2003
Austin, TX, USA
2003 Int'l Conf. on Characterization and Metrology for ULSI Tech.