@conference{759106, author = {Christopher Cromer and Marla Dowell and Richard Jones and Darryl Keenan and Shao Yang}, title = {A Primary Standard for 157 nm Excimer Laser Measurements}, year = {2003}, number = {683}, month = {2003-03-01 00:03:00}, publisher = {AIP Conf. Proc., Austin, TX, USA}, language = {en}, }