Dose Meter Calibration System for 193 nm

Published

May 1, 2002

Author(s)

Holger Laabs, Richard D. Jones, Marla L. Dowell

Abstract

We have established a measurement system for the direct calibration of energy density (dose) meters. It consists of beam-shaping objects, a beamsplitter, calibrated apertures, a beam profile monitor, an energy monitor, and a transfer standard. The 193 nm wavelength beam is homogenized by a fly's eye array producing a measured beam uniformity of 1.3 % (according to ISO 13694). This is well within the semiconductor manufacturing requirements for excimer laser beam uniformity of less than {+or-} 3%. Correlation measurements indicate the magnitude of spatial fluctuations within the homogenized beam profile have a correlation factor greater than 97%, validating our use of a beamsplitter. An analysis of confidence interval is approximately {+or-} 1.5%. The overall uncertainty is mainly dependent upon the uncertainty of the transfer standard's calibration factor; replacing the transfer standard with a primary standard, such as an electrically-calibrated calorimeter, should reduce the overall measurement uncertainty.

Proceedings Title

NEWRAD 2002

Conference Dates

May 20-24, 2002

Conference Location

Gaithersburg, MD

Pub Type

Conferences

Download Paper

Local Download

Keywords

excimer laser, laser metrology, uv detectors

Citation

Laabs, H. , Jones, R. and Dowell, M. (2002), Dose Meter Calibration System for 193 nm, NEWRAD 2002, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30760 (Accessed October 17, 2025)