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Search Publications by: Zachary H. Levine (Fed)

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Displaying 126 - 150 of 153

Accurate Pattern Registration for Integrated Circuit Tomography

July 1, 2001
Author(s)
Zachary H. Levine, S Grantham, S Neogi, S P. Frigo, I McNulty, C C. Retsch, Y Wang, Thomas B. Lucatorto
As part of an effort to develop high resolution microtomography for engineered structures, a two-level copper integrated circuit interconnect was imaged using 1.83 keV x-rays at 14 angles employing a full-field Fresnel zone plate microscope. A major

Calibration of High-Resolution X-Ray Tomography With Atomic Force Microscopy

November 1, 2000
Author(s)
A R. Kalukin, B Winn, S S. Wang, C Jacobsen, Zachary H. Levine, Joseph Fu
For two-dimensional x-ray imaging of thin films, the technique of scanning transmission x-ray miscroscopy (STXM) has achieved images with feature sizes as small as 40 nm in recent years. However, calibration of three-dimensional tomographic images that are

Tomography of Integrated Circuit Interconnect With an Electromigration Void

May 1, 2000
Author(s)
Zachary H. Levine, A R. Kalukin, M Kuhn, S P. Frigo, I McNulty, C C. Retsch, Y Wang, Uwe Arp, Thomas B. Lucatorto, Bruce D. Ravel, Charles S. Tarrio
An integrated circuit interconnect was subject to accelerated-life conditions to induce an electromigration void. The silicon substrate was removed, leaving only the interconnect encased test structure encased in silica. We imaged the sample with 1750 eV

Methods to Remove Distortion Artifacts in Scanned Projections

July 1, 1999
Author(s)
A R. Kalukin, Zachary H. Levine, Charles S. Tarrio, S P. Frigo, I McNulty, S S. Wang, C C. Retsch, M Kuhn, B Winn
Atrifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental atrifacts, and hence reducing

Tomographic Reconstruction of an Integrated Circuit Interconnect

January 1, 1999
Author(s)
Zachary H. Levine, A R. Kalukin, S P. Frigo, I McNulty, M Kuhn
An Al-W-silica integrated circuit interconnect sample was thinned to several micro υ and scanned across a 200 nm focal spot of a Fresnel zone plate operating at photon energy of 1573 eV. The experiment was performed on beamline 2-ID-B of the Advanced

Effects of Feature Orientation in Tomographic Reconstructions

November 6, 1998
Author(s)
A R. Kalukin, Zachary H. Levine, S P. Frigo, I McNulty, M Kuhn
An imaging experiment has been performed at the Advanced Photon source for the purpose of making and three-dimensional visualization of a test sample containing an interconnect. Nine nanographs were made using 1573 eV photons and a scanning transmission x

Local-density-functional calculations of the Energy of Atoms

January 1, 1997
Author(s)
Svetlana A. Kotochigova, Zachary H. Levine, Eric L. Shirley, Mark D. Stiles, Charles W. Clark
The total energies of atoms and with atomic number Ζ from 1 to 92 and singly-charge cations with Ζ from 2 to 92 have been calculated to an accuracy of 1 υHartree within four variants of the Kohn-Sham local-density approximation. The approximations
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