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Intrinsic birefringence in cubic crystals: a new concern for lithography

Published

Author(s)

J H. Burnett, Zachary H. Levine, Eric L. Shirley
Citation
Photonics Spectra
Volume
35

Citation

Burnett, J. , Levine, Z. and Shirley, E. (2001), Intrinsic birefringence in cubic crystals: a new concern for lithography, Photonics Spectra (Accessed April 23, 2024)
Created December 31, 2000, Updated October 12, 2021