Tomography of Integrated Circuit Interconnects

Published

October 1, 2001

Author(s)

Zachary H. Levine, A R. Kalukin, M Kuhn, S P. Frigo, I McNulty, C C. Retsch, Y Wang, Uwe Arp, Thomas B. Lucatorto, Bruce D. Ravel, Charles S. Tarrio

Abstract

00 Word summary based on the paper:Z. H. Levine, A. R. Kalukin, M. Kuhn, S. P. Frigo, I. McNulty,>C. C. Retsch, Y. Wang, U. Arp, T. B. Lucatorto, B. D. Ravel, and C. Tarrio,>``Microtomography of Integrated Circuit Interconnect with an> Electromigration Void'', J. Appl. Phys. 87, 4483 (2000).>>> My summary is drawn from this paper, as well as:>>A. R. Kalukin, Z. H. Levine, C. Tarrio, S. P. Frigo, I. McNulty,>Y. Wang, C. C. Retsch, M. Kuhn, and B. Winn,>``Methods to remove distortion artifacts in scanned projections'',>U. Bonse, Editor, Proc. SPIE 3772, 237 (1999).>>Z. H. Levine, A. R. Kalukin, S. P. Frigo, I. McNulty, and M. Kuhn,>``Tomographic Reconstruction of an Integrated Circuit Interconnect'',>Appl. Phys. Lett. 74, 150 (1999).>>Z. H. Levine, S. Grantham, S. Neogi, S. P. Frigo,>I. McNulty, C. C. Retsch, Y. Wang, and T. B. Lucatorto,>``Accurate pattern registration for integrated circuit tomography'',>J. Appl. Phys., in press.

Citation

APS Forefront 1 (ANL/APS/TB-42): Synchrotron Radiation Instrumentation-CAT - Sector 2

Pub Type

Journals

Keywords

Tomography

Citation

Levine, Z. , Kalukin, A. , Kuhn, M. , Frigo, S. , McNulty, I. , Retsch, C. , Wang, Y. , Arp, U. , Lucatorto, T. , Ravel, B. and Tarrio, C. (2001), Tomography of Integrated Circuit Interconnects, APS Forefront 1 (ANL/APS/TB-42): Synchrotron Radiation Instrumentation-CAT - Sector 2 (Accessed December 14, 2024)