Methods to Remove Distortion Artifacts in Scanned Projections
A R. Kalukin, Zachary H. Levine, Charles S. Tarrio, S P. Frigo, I McNulty, S S. Wang, C C. Retsch, M Kuhn, B Winn
Atrifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental atrifacts, and hence reducing reconstruction atrifacts. Two-dimensional and three-dimensional images acquired with scanning transmissino x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedurescan be successfully applied.
Developments in X-Ray Tomography II ||| SPIE
July 22-23, 1999
Proceedings of SPIE--the International Society for Optical Engineering
, Levine, Z.
, Tarrio, C.
, Frigo, S.
, McNulty, I.
, Wang, S.
, Retsch, C.
, Kuhn, M.
and Winn, B.
Methods to Remove Distortion Artifacts in Scanned Projections, Developments in X-Ray Tomography II ||| SPIE, Denver, CO
(Accessed December 1, 2023)