Methods to Remove Distortion Artifacts in Scanned Projections

Published

July 1, 1999

Author(s)

A R. Kalukin, Zachary H. Levine, Charles S. Tarrio, S P. Frigo, I McNulty, S S. Wang, C C. Retsch, M Kuhn, B Winn

Abstract

Atrifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental atrifacts, and hence reducing reconstruction atrifacts. Two-dimensional and three-dimensional images acquired with scanning transmissino x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedurescan be successfully applied.

Proceedings Title

Developments in X-Ray Tomography II ||| SPIE

Conference Dates

July 22-23, 1999

Conference Location

Denver, CO

Conference Title

Proceedings of SPIE--the International Society for Optical Engineering

Pub Type

Conferences

Keywords

artifact, distortion, integrated circuit interconnect, interconnect, microtomography, nanotomography, tomography, x-ray imaging, x-ray microscopy

Citation

Kalukin, A. , Levine, Z. , Tarrio, C. , Frigo, S. , McNulty, I. , Wang, S. , Retsch, C. , Kuhn, M. and Winn, B. (1999), Methods to Remove Distortion Artifacts in Scanned Projections, Developments in X-Ray Tomography II ||| SPIE, Denver, CO (Accessed October 10, 2024)