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Effects of Feature Orientation in Tomographic Reconstructions

Published

Author(s)

A R. Kalukin, Zachary H. Levine, S P. Frigo, I McNulty, M Kuhn

Abstract

An imaging experiment has been performed at the Advanced Photon source for the purpose of making and three-dimensional visualization of a test sample containing an interconnect. Nine nanographs were made using 1573 eV photons and a scanning transmission x-ray microscope having a focal spot size of about 160 nanometers. Reconstructions were attempted using a Simultaneous Iterative Reconstruction Technique. Artifacts that appeared in the reconstructions lead to simulations that resulted in the following conclusion: for a sample that is highly opaartifacts that appeared in the reconstructions lead to simulations that resulted in the following conclusion: for a sample that is highly opaque along certain lines of sight, the sample must be strategically oriented with respect to the rotation axis to minimize the attenuation of photons through the sample, in order to attain the most contrast in each projection, and hence the best information for reconstruction.
Citation
X-Ray Microfocusing: Applications and Techniques
Volume
3449

Keywords

artifact, image reconstruction, interconnect, STXM, tomography, x-ray imaging, x-ray microscopy

Citation

Kalukin, A. , Levine, Z. , Frigo, S. , McNulty, I. and Kuhn, M. (1998), Effects of Feature Orientation in Tomographic Reconstructions, X-Ray Microfocusing: Applications and Techniques, [online], https://doi.org/10.1117/12.330353 (Accessed May 27, 2024)

Issues

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Created November 6, 1998, Updated November 10, 2018