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Accurate pattern registration for integrated circuit tomography

Published

Author(s)

Zachary H. Levine, Steven E. Grantham, S Neogi, S P. Frigo, I McNulty, C C. Retsch, Ying-ju Wang, Thomas B. Lucatorto
Citation
Journal of Applied Physics
Volume
90

Citation

Levine, Z. , Grantham, S. , Neogi, S. , Frigo, S. , McNulty, I. , Retsch, C. , Wang, Y. and Lucatorto, T. (2001), Accurate pattern registration for integrated circuit tomography, Journal of Applied Physics (Accessed April 23, 2024)
Created January 1, 2001, Updated February 17, 2017