@article{145126,
  author = {Zachary Levine and Steven Grantham and S Neogi and S Frigo and I McNulty and C Retsch and Ying-Ju Wang and Thomas Lucatorto},
  title = {Accurate pattern registration for integrated circuit tomography},
  year = {2001},
  number = {90},
  month = {2001-01-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}