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Search Publications by: Glenn Holland (Fed)

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Displaying 1 - 24 of 24

Large Area Real-Space Crystallography and Thickness Determination of Mesoscopic Semiconductor Membranes Using Zone Axis Patterns, Cold Field-Emission SEM/STEM, and Analytical S/TEM

July 25, 2025
Author(s)
Vladimir Oleshko, Glenn Holland, Daron Westly, John Villarrubia
Structural and dimensional characterization of layered structures in semiconductors is increasingly important for microelectronics manufacturing because of the continuing downward scaling of devices. Manufacturers require high-precision non-destructive

Multi-technique reference measurement of critical dimension and shape for model validation in scanning electron microscopy

April 22, 2025
Author(s)
Wataru Yamane, Daron Westly, Glenn Holland, Yu Yamazawa, Naoto Ito, Andras Vladar, John Villarrubia
In semiconductor device manufacturing, 3D structure measurements of newly complex devices would be valuable alongside conventional scanning electron microscopy (SEM) and critical dimension SEM (CD-SEM) measurements. Since these applications in SEM directly

A method to calibrate angular positioning errors using a laser tracker and a plane mirror

March 20, 2025
Author(s)
Balasubramanian Muralikrishnan, Katharine Shilling, Vincent Lee, Olga Ridzel, Glenn Holland, John Villarrubia
We describe a method to calibrate angular positioning errors of a rotation stage using a laser tracker (LT), a plane mirror mounted on the stage, and stationary registration nests placed around the stage. Our technique involves determining the direction of

Strong interactions between integrated microresonators and alkali atomic vapors: towards single-atom, single-photon operation

September 24, 2024
Author(s)
Roy Zekzer, Xiyuan Lu, Khoi Hoang, Rahul Shrestha, Sharoon Austin, Feng Zhou, Ashish Chanana, Glenn Holland, Daron Westly, Paul Lett, Alexey Gorshkov, Kartik Srinivasan
Cavity quantum electrodynamics (cQED), the interaction of a two-level system with a high quality factor (Q) cavity, is a foundational building block in different architectures for quantum computation, communication, and metrology. The strong interaction

A NIST facility for Resonant Soft X-ray Scattering measuring nano-scale soft matter structure at NSLS-II

January 26, 2021
Author(s)
Eliot Gann, Glenn Holland, Regis Kline, Peter Beaucage, Dean DeLongchamp, Daniel Fischer, Brian Collins, Terry McAfee, Christopher McNeill, Thomas Crofts
We present the design and performance of a Resonant Soft X-ray Scattering (RSoXS) station designed for soft matter characterization built by the National institute of Standards and Technology (NIST) at the National Synchrotron Light Source-II (NSLS-II)

Electron and x-ray focused beam-induced cross-linking in liquids: Toward rapid continuous 3D nanoprinting and interfacing using soft materials

September 15, 2020
Author(s)
Tanya Gupta, Evgheni Strelcov, Glenn Holland, Joshua D. Schumacher, Yang Yang, Mandy Esch, Vladimir Aksyuk, Patrick Zeller, Matteo Amati, Luca Gregoratti, Andrei Kolmakov
Additive fabrication of biocompatible 3D structures out of liquid hydrogel solutions has become pivotal technology for tissue engineering, soft robotics, biosensing, drug delivery etc. Electron and X-ray lithography are well suited to pattern nanoscopic

Lymphatic Vessel on a Chip with Capability for Exposure to Cyclic Fluidic Flow

September 7, 2020
Author(s)
Parinaz Fathi, Glenn E. Holland, Dipanjan Pan, Mandy B. Esch
Lymph nodes comprise a complex organ system that is essential in regulating the development of host immune responses. Due to the complexity of lymph nodes and the lack of animal models that can accurately replicate the lymphatic functionality of humans

Pumpless Microfluidic Devices for Generating Healthy and Diseased Endothelia

September 27, 2019
Author(s)
Yang Yang, Parinaz Fathi, Glenn Holland, Dipanjan Pan, Nam Wang, Mandy Esch
We have developed a pumpless cell culture platform that can recirculate small amounts of cell culture medium (400 µL) in a unidirectional or bidirectional flow pattern. The device produces an average wall shear stress of up to 0.587 Pa ± 0.006 Pa without

Revisiting the Photon-Drag Effect in Metal Films

August 2, 2019
Author(s)
Jared H. Strait, Glenn E. Holland, Wenqi Zhu, Cheng Zhang, Bojan R. Ilic, Amit K. Agrawal, Domenico Pacifici, Henri J. Lezec
The photon-drag effect, the rectified current in a medium induced by conservation of momentum of absorbed or redirected light, is a unique probe of the detailed mechanisms underlying radiation pressure. We revisit this effect in gold, a canonical Drude

Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies

December 28, 2018
Author(s)
Christopher B. Wallin, Roberto De Alba, Daron Westly, Glenn Holland, Scott Grutzik, Richard Rand, Alan Zehnder, Vladimir Aksyuk, Slava Krylov, Robert Ilic
We investigate the collective dynamics and nondegenerate parametric resonance (NPR) of coplanar, interdigitated arrays of microcantilevers distinguished by their cantilevers having linearly expanding lengths and thus varying natural frequencies. Within a

Nanophotonic atomic force microscope transducers enable chemical composition and thermal conductivity measurements at the nanoscale

September 13, 2017
Author(s)
Jungseok Chae, Sangmin An, Georg Ramer, Vitalie Stavila, Glenn Holland, Yohan Yoon, Alec Talin, Mark Allendorf, Vladimir Aksyuk, Andrea Centrone
The atomic force microscope (AFM) offers a rich observation window on the nanoscale, yet many dynamic phenomena are too fast and too weak for direct detection, urging measurement innovation. Integrated cavity-optomechanics is revolutionizing

High-Resolution Imaging and Spectroscopy at High Pressure: A Novel Liquid Cell for the Transmission Electron Microscope

December 9, 2015
Author(s)
Mihaela M. Tanase, Jonathan P. Winterstein, Renu Sharma, Vladimir A. Aksyuk, Glenn E. Holland, James A. Liddle
We demonstrate quantitative core-loss electron energy-loss spectroscopy of iron oxide nanoparticles and imaging resolution of Ag nanoparticles in liquid down to 0.24 nm, in both transmission and scanning-transmission modes, in a novel, monolithic liquid

Near-Field Asymmetries in Plasmonic Resonators

February 12, 2015
Author(s)
Vladimir Aksyuk, Basudev Lahiri, Glenn Holland, Andrea Centrone
Surface-enhanced infrared absorption (SEIRA) spectroscopy exploits the locally enhanced field surrounding plasmonic metamaterials to increase the sensitivity of infrared spectroscopy. Light polarization and incident angle are important factors for exciting

Nanoscale Imaging and Spectroscopy of Plasmonic Modes with the PTIR technique

August 1, 2014
Author(s)
Aaron M. Katzenmeyer, Jungseok Chae, Richard Kasica, Glenn Holland, Basudev Lahiri, Andrea Centrone
The collective oscillation of conduction electrons in plasmonic nanomaterials allows the coupling of propagating light waves with nanoscale volumes of matter ("hot spots") and allows engineering their optical response from the UV to THz as a function of
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