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PUBLICATIONS

Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy

Published

Author(s)

Sang M. An, Jie Zou, Glenn Holland, Jungseok Chae, Andrea Centrone, Vladimir Aksyuk

Abstract

We introduce an optomechanical transducer-based nanoscale cantilever for atomic force microscope (AFM). The high optical quality factor of the microdisk resonator enables detection of the nanoscale cantilever motion with high sensitivity. A low stiffness (approximately 1 N/m) and high frequency (above approximately 4 MHz) nanoscale cantilever provides a wide bandwidth for fast motion detection without sacrificing force sensitivity. We demonstrate the capabilities of the device in AFM for fast scanning (nominal 30 μm × 30 μm, 39.06 Hz line rate, 2.93 mm/s tip speed) with a fast settling time (< 2 μs). PTIR (photo-thermal induced resonance) measurement of a 50 nm polymer film is also demonstrated.
Proceedings Title
Proceedings, Solid State Sensor, Actuator and Microsystems Workshop
Conference Dates
June 5-9, 2016
Conference Location
Hilton Head Island, SC, US
Conference Title
Hilton Head 2016 Workshop
Pub Type
Conferences

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Local Download

Keywords

nanomechanical system, NEMS, MEMS, motion metrology
Sensors, Nanomechanics, Materials characterization and Biomaterials

Citation

An, S. , Zou, J. , Holland, G. , Chae, J. , Centrone, A. and Aksyuk, V. (2018), Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy, Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920671 (Accessed October 16, 2025)

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Created June 2, 2018, Updated April 6, 2022
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