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Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy



Sang M. An, Jie Zou, Glenn E. Holland, Jungseok Chae, Andrea Centrone, Vladimir A. Aksyuk


We introduce an optomechanical transducer-based nanoscale cantilever for atomic force microscope (AFM). The high optical quality factor of the microdisk resonator enables detection of the nanoscale cantilever motion with high sensitivity. A low stiffness (approximately 1 N/m) and high frequency (above approximately 4 MHz) nanoscale cantilever provides a wide bandwidth for fast motion detection without sacrificing force sensitivity. We demonstrate the capabilities of the device in AFM for fast scanning (nominal 30 μm × 30 μm, 39.06 Hz line rate, 2.93 mm/s tip speed) with a fast settling time (
Proceedings Title
Proceedings, Solid State Sensor, Actuator and Microsystems Workshop
Conference Dates
June 5-9, 2016
Conference Location
Hilton Head Island, SC
Conference Title
Hilton Head 2016 Workshop


nanomechanical system, NEMS, MEMS, motion metrology
Created June 3, 2018, Updated September 13, 2018