NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy

Published

Author(s)

Sang M. An, Jie Zou, Glenn Holland, Jungseok Chae, Andrea Centrone, Vladimir Aksyuk

Abstract

We introduce an optomechanical transducer-based nanoscale cantilever for atomic force microscope (AFM). The high optical quality factor of the microdisk resonator enables detection of the nanoscale cantilever motion with high sensitivity. A low stiffness (approximately 1 N/m) and high frequency (above approximately 4 MHz) nanoscale cantilever provides a wide bandwidth for fast motion detection without sacrificing force sensitivity. We demonstrate the capabilities of the device in AFM for fast scanning (nominal 30 μm × 30 μm, 39.06 Hz line rate, 2.93 mm/s tip speed) with a fast settling time (< 2 μs). PTIR (photo-thermal induced resonance) measurement of a 50 nm polymer film is also demonstrated.
Proceedings Title
Proceedings, Solid State Sensor, Actuator and Microsystems Workshop
Conference Dates
June 5-9, 2016
Conference Location
Hilton Head Island, SC, US
Conference Title
Hilton Head 2016 Workshop
Pub Type
Conferences

Download Paper

Local Download

Keywords

nanomechanical system, NEMS, MEMS, motion metrology
Sensors, Nanomechanics, Materials characterization and Biomaterials

Citation

An, S. , Zou, J. , Holland, G. , Chae, J. , Centrone, A. and Aksyuk, V. (2018), Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy, Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920671 (Accessed October 10, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created June 2, 2018, Updated April 6, 2022
Was this page helpful?