An, S.
, Zou, J.
, Holland, G.
, Chae, J.
, Centrone, A.
and Aksyuk, V.
(2018),
Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy, Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920671
(Accessed December 9, 2024)
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Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy
Published
Author(s)
, Jie Zou, , , ,
Abstract
We introduce an optomechanical transducer-based nanoscale cantilever for atomic force microscope (AFM). The high optical quality factor of the microdisk resonator enables detection of the nanoscale cantilever motion with high sensitivity. A low stiffness (approximately 1 N/m) and high frequency (above approximately 4 MHz) nanoscale cantilever provides a wide bandwidth for fast motion detection without sacrificing force sensitivity. We demonstrate the capabilities of the device in AFM for fast scanning (nominal 30 μm × 30 μm, 39.06 Hz line rate, 2.93 mm/s tip speed) with a fast settling time (< 2 μs). PTIR (photo-thermal induced resonance) measurement of a 50 nm polymer film is also demonstrated.Proceedings Title
Proceedings, Solid State Sensor, Actuator and Microsystems Workshop
Conference Dates
June 5-9, 2016
Conference Location
Hilton Head Island, SC, US
Conference Title
Hilton Head 2016 Workshop
Pub Type
Conferences
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Keywords
nanomechanical system, NEMS, MEMS, motion metrology
Citation
Issues
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Created June 2, 2018, Updated April 6, 2022