Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy

Published: June 03, 2018


Sang M. An, Jie Zou, Glenn E. Holland, Jungseok Chae, Andrea Centrone, Vladimir A. Aksyuk


We introduce an optomechanical transducer-based nanoscale cantilever for atomic force microscope (AFM). The high optical quality factor of the microdisk resonator enables detection of the nanoscale cantilever motion with high sensitivity. A low stiffness (approximately 1 N/m) and high frequency (above approximately 4 MHz) nanoscale cantilever provides a wide bandwidth for fast motion detection without sacrificing force sensitivity. We demonstrate the capabilities of the device in AFM for fast scanning (nominal 30 μm × 30 μm, 39.06 Hz line rate, 2.93 mm/s tip speed) with a fast settling time (< 2 μs). PTIR (photo-thermal induced resonance) measurement of a 50 nm polymer film is also demonstrated.
Proceedings Title: Proceedings, Solid State Sensor, Actuator and Microsystems Workshop
Conference Dates: June 5-9, 2016
Conference Location: Hilton Head Island, SC
Conference Title: Hilton Head 2016 Workshop
Pub Type: Conferences

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nanomechanical system, NEMS, MEMS, motion metrology
Created June 03, 2018, Updated September 13, 2018