@conference{871016,
  author = {Sang An and Jie Zou and Glenn Holland and Jungseok Chae and Andrea Centrone and Vladimir Aksyuk},
  title = {Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy},
  year = {2018},
  month = {2018-06-02 04:06:00},
  publisher = {Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920671},
  language = {en},
}