TY  - CONF
AU  - Sang An
AU  - Jie Zou
AU  - Glenn Holland
AU  - Jungseok Chae
AU  - Andrea Centrone
AU  - Vladimir Aksyuk
C2  - Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US
DA  - 2018-06-02 04:06:00
LA  - en
PB  - Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US
PY  - 2018
TI  - Optomechanical transducer-based soft and high frequency nanoscale cantilever for atomic force microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920671
ER  -