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Search Publications by: William F Guthrie (Fed)

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Displaying 76 - 96 of 96

Summary of Comparison of Realizations of the ITS-90 Over the Range 83.8058 K to 933.473 K: CCT Key Comparison CCT-K3

April 1, 2002
Author(s)
Billy W. Mangum, Gregory F. Strouse, William F. Guthrie, R Pello, M F. Stock, E Renaot, Y Hermier, G Bonnier, P Marcarino, K S. Gam, K H. Kang, Y G. Kim, J V. Nicholas, D. R. White, T D. Dransfield, Y Duan, Y Qu, J Connolly, R L. Rusby, J Gray, G J. Sutton, D I. Head, K D. Hill, A G. Steele, K Nara, Tony J. Tegeler, U Noatsch, D Heyer, B Fellmuth, B Thiele-Krivoj, S Duris, A I. Pokhodun, N P. Moiseeva, A G. Ivanova, P A. de Groot, J F. Dubbeldam
This is a report to the Comite Consultatif de Thermometrie (CCT) on Key Comparison 3, i.e., the comparison of realizations of the ITS-90 over the range 83.8058 K to 933.473 K. The differences in the realizations of the various fixed points in this range of

CD Reference Materials for Sub-Tenth Micrometer Applications

March 1, 2002
Author(s)
Richard A. Allen, Michael W. Cresswell, William F. Guthrie, Loren W. Linholm, H Bogardus, J V. Martinez de pinillos, B A. Am ende, Christine E. Murabito, M H. Bennett
Prototype linewidth reference materials with Critical Dimensions (CDs) as narrow as 70 nm have been patterned in (110) silicon-on-insulator films. The sidewalls of the reference features are parallel, normal to the substrate surface, and have almost

Effects of Hydrolytic Degradation on In Vitro Biocompatibility of Poly (d,l-lactic acid)

March 1, 2002
Author(s)
S Yoneda, William F. Guthrie, David S. Bright, C A. Khatri, Francis W. Wang
Objective: In order to investigate the effects of hydrolytic degradation on the biocompatibility of poly (d,l-lactic acid) [P(d,l-LA], the initial attachment and the mitochondrial activity of MC3T3-El osteoblast-like cells on various degraded P(d,l-LA)

Nanoindentation of Polymers: An Overview

March 1, 2001
Author(s)
Mark R. VanLandingham, John S. Villarrubia, William F. Guthrie, G F. Meyers
Indentation measurements made with atomic force microscopy (AFM) probes are relative measurements, largely due to the lack of information regarding the tip shape of the AFM probes. Also, current tip shape calibration procedures used in depth-sensing

An Approach to Combining Results from Multiple Methods Motivated by the ISO GUM

August 1, 2000
Author(s)
M Levenson, D L. Banks, K Eberhardt, L M. Gill, William F. Guthrie, Hung-Kung Liu, M Vangel, James H. Yen, Nien F. Zhang
The problem of determining a consensus value and its uncertainty from the results of multiple methods or laboratories is discussed. Desirable criteria of a solution are presented. A solution based on the ISO Guide to the Expression of Uncertainty in

Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries

May 1, 1999
Author(s)
Michael W. Cresswell, Nadine Guillaume, Richard A. Allen, William F. Guthrie, Rathindra Ghoshtagore, James C. OwenI II, Z. Osborne, N. Sullivan, Loren W. Linholm
This paper describes methods for the extraction of sheet resistance from V/I measurements made on four-terminal sheet resistors incorporated into electrical linewidth test structures patterned with non-planar geometries in monocrystalline silicon-on

Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries

December 31, 1998
Author(s)
Michael W. Cresswell, Nadine Guillaume, Richard A. Allen, William F. Guthrie, Rathindra Ghoshtagore, James C. OwenI II, Z. Osborne, N. Sullivan, Loren W. Linholm
This paper describes methods for the extraction of sheet resistance from V/I measurements made on four-terminal sheet resistors incorporated into electrical linewidth test structures patterned with non-planar geometries in monocrystalline silicon-on

Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference-Material Applications

May 1, 1998
Author(s)
Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Rathindra Ghoshtagore, Loren W. Linholm, J. J. Sniegowski
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of mono-crystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are

Hybrid Optical-Electrical Overlay Test Structure

January 1, 1997
Author(s)
Michael W. Cresswell, Robert Allen, L Linholm, William F. Guthrie, William B. Penzes, A Gurnell
This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor semiconductor-device fabrication processes. Such optical instruments are known to be vulnerable to

Open-Source Excel Tools For Statistical Metrology

Author(s)
Hung-Kung Liu, William F. Guthrie, Juan Soto
In this paper we introduce an approach to construct statistical metrology tools with a Microsoft Excel based interface that use the open source statistical package R as the computational engine. These metrology tools will enable Excel users to access a

Troubleshooting Key Comparisons

Author(s)
Adriana Hornikova, William F. Guthrie
Key Comparisons are international inter-laboratory studies used to establish the degree of equivalence between national measurement standards. These studies, carried out by National Metrology Institutes, are time-consuming, but necessary to facilitate