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PUBLICATIONS

Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference Material Applications

Published

Author(s)

Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A. Allen, William F. Guthrie, Loren W. Linholm
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Conference Dates
March 18-20, 1997
Conference Location
Monterey, CA, USA
Pub Type
Conferences

Citation

Cresswell, M. , Sniegowski, J. , Ghoshtagore, R. , Allen, R. , Guthrie, W. and Linholm, L. (1997), Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference Material Applications, Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA (Accessed April 25, 2024)

Created December 30, 1997, Updated October 12, 2021