TY  - CONF
AU  - Michael Cresswell
AU  - J. Sniegowski
AU  - Rathindra Ghoshtagore
AU  - Richard Allen
AU  - William Guthrie
AU  - Loren Linholm
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
DA  - 1997-12-31 00:12:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
PY  - 1997
TI  - Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference Material Applications
ER  -