@conference{846646,
  author = {Michael Cresswell and J. Sniegowski and Rathindra Ghoshtagore and Richard Allen and William Guthrie and Loren Linholm},
  title = {Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference Material Applications},
  year = {1997},
  month = {1997-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA},
  language = {en},
}