Cresswell, M.
, Allen, R.
, Linholm, L.
, Guthrie, W.
and Gurnell, A.
(1996),
Hybrid Optical-Electrical Overlay Test Structure, Proc., 1996 IEEE International Conference on Mircroelectronic Test Structures, Trento, 1, IT
(Accessed October 11, 2024)