TY  - CONF
AU  - Michael Cresswell
AU  - Richard Allen
AU  - Loren Linholm
AU  - William Guthrie
AU  - A. Gurnell
C2  - Proc., 1996 IEEE International Conference on Mircroelectronic Test Structures, Trento, 1, IT
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 9
PB  - Proc., 1996 IEEE International Conference on Mircroelectronic Test Structures, Trento, 1, IT
PY  - 1996
TI  - Hybrid Optical-Electrical Overlay Test Structure
ER  -