@conference{846831,
  author = {Michael Cresswell and Richard Allen and Loren Linholm and William Guthrie and A. Gurnell},
  title = {Hybrid Optical-Electrical Overlay Test Structure},
  year = {1996},
  number = {9},
  month = {1996-12-31 00:12:00},
  publisher = {Proc., 1996 IEEE International Conference on Mircroelectronic Test Structures, Trento, 1, IT},
  language = {en},
}