NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Hybrid Optical-Electrical Overlay Test Structure

Published

Author(s)

Michael W. Cresswell, Richard A. Allen, Loren W. Linholm, William F. Guthrie, William B. Penzes, A. W. Gurnell
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
10
Issue
2
Pub Type
Journals

Citation

Cresswell, M. , Allen, R. , Linholm, L. , Guthrie, W. , Penzes, W. and Gurnell, A. (1997), Hybrid Optical-Electrical Overlay Test Structure, IEEE Transactions on Semiconductor Manufacturing (Accessed October 18, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created April 30, 1997, Updated October 12, 2021
Was this page helpful?