TY  - JOUR
AU  - Michael Cresswell
AU  - Richard Allen
AU  - Loren Linholm
AU  - William Guthrie
AU  - William Penzes
AU  - A. Gurnell
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1997-05-01 00:05:00
LA  - en
M1  - 10
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1997
TI  - Hybrid Optical-Electrical Overlay Test Structure
ER  -