@article{782546,
  author = {Michael Cresswell and Richard Allen and Loren Linholm and William Guthrie and William Penzes and A. Gurnell},
  title = {Hybrid Optical-Electrical Overlay Test Structure},
  year = {1997},
  number = {10},
  month = {1997-05-01 00:05:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}