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Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films

Published

Author(s)

W. F. Lee, William F. Guthrie, Michael W. Cresswell, Richard A. Allen, J. J. Sniegowski, Loren W. Linholm
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Conference Dates
March 18-20, 1997
Conference Location
Monterey, CA, USA

Citation

Lee, W. , Guthrie, W. , Cresswell, M. , Allen, R. , Sniegowski, J. and Linholm, L. (1997), Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films, Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA (Accessed April 14, 2024)
Created December 30, 1997, Updated October 12, 2021