@conference{846011,
  author = {W. Lee and William Guthrie and Michael Cresswell and Richard Allen and J. Sniegowski and Loren Linholm},
  title = {Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films},
  year = {1997},
  month = {1997-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA},
  language = {en},
}