TY - CONF AU - W. Lee AU - William Guthrie AU - Michael Cresswell AU - Richard Allen AU - J. Sniegowski AU - Loren Linholm C2 - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA DA - 1997-12-31 00:12:00 LA - en PB - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA PY - 1997 TI - Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films ER -