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Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology

Published

Author(s)

Santos D. Mayo, Joseph Kopanski, William F. Guthrie
Proceedings Title
Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD, USA

Keywords

2 D modeling, overlay metrology, scanning capacitance microscopy, SCM, scanning probe microscopy, SPM, test pattern

Citation

Mayo, S. , Kopanski, J. and Guthrie, W. (1998), Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology, Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA (Accessed July 23, 2024)

Issues

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Created December 30, 1998, Updated October 12, 2021