Mayo, S.
, Kopanski, J.
and Guthrie, W.
(1998),
Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology, Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
(Accessed January 25, 2025)
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Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology
Published
Author(s)
, ,
Proceedings Title
Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Keywords
2 D modeling, overlay metrology, scanning capacitance microscopy, SCM, scanning probe microscopy, SPM, test pattern
Citation
Issues
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Created December 30, 1998, Updated October 12, 2021