@conference{754141,
  author = {Santos Mayo and Joseph Kopanski and William Guthrie},
  title = {Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology},
  year = {1998},
  month = {1998-12-31 00:12:00},
  publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}