TY - CONF AU - Mayo, Santos AU - Kopanski, Joseph AU - Guthrie, William C2 - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA DA - 1998-12-31 00:12:00 LA - en PB - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA PY - 1998 TI - Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology ER -