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Search Publications by: Richard S. Gates (Assoc)

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Displaying 1 - 25 of 58

Nanoscale Structure-Property Characterization of a Nanopatterned Hybrid Organic-Inorganic Nanoporous Material

April 13, 2017
Author(s)
Gheorghe Stan, Richard S. Gates, Qichi Hu, Kevin Kjoller, Craig Prater, Alan Myers, Kanwal Singh, Ebony Mays, Sean W. King
The continued advancement of nanostructured materials and exploitation of nanoscale size effects will ultimately require understanding material structure-property relationships at the nanoscale. Despite a plethora of metrologies capable of characterizing

Smart Electronic Laboratory Notebooks for the NIST Research Environment

December 2, 2015
Author(s)
Richard S. Gates, Mark McLean, William A. Osborn
Laboratory notebooks have been a staple of scientific research for centuries for organizing and documenting ideas and experiments. Modern laboratories are more and more reliant on electronic data collection and analysis so it seems inevitable that the

Mechanical property changes in porous low-k dielectric thin films during processing

October 15, 2014
Author(s)
Gheorghe Stan, Richard S. Gates, Premsagar P. Kavuri, Jessica Torres, David Michalak, Canay Ege, Jeff Bielefeld, Sean W. King
The design of future generations of Cu-low-k dielectric interconnects with reduced electronic crosstalk often requires engineering materials with an optimal trade off between their dielectric constant and elastic modulus. This is because the benefits

Intermittent contact resonance atomic force microscopy

May 23, 2014
Author(s)
Gheorghe Stan, Richard S. Gates
The intermittent contact resonance atomic force microscopy (ICR-AFM) mode proposed here is a new frequency modulation technique performed in scanning force controlled AFM modes like force volume or peak force tapping. It consists of tracking the change in

Accurate Spring Constant Calibration for very Stiff Atomic Force Microscopy Cantilevers

November 26, 2013
Author(s)
Scott Grutzik, Richard S. Gates, Yvonne B. Gerbig, Douglas T. Smith, Robert F. Cook, Alan Zehnder
There are many atomic force microscopy (AFM) applications that rely on quantifying the force between the AFM cantilever tip and the sample. The AFM does not explicitly measure force, however, so in such cases knowledge of the cantilever stiffness is

On the bending strength of single-crystal silicon theta-like specimens

July 10, 2013
Author(s)
Rebecca R. Kirkpatrick, William Alexander Osborn, Michael S. Gaither, Richard S. Gates, Frank W. DelRio, Robert F. Cook
A new theta geometry was developed for micro-scale bending strength measurements. The new "gap" theta specimen was a simple modification of the arch theta specimen that enabled micro-scale tensile testing. The gap theta was demonstrated here on single

Effect of Organic SAMs on the Evolution of Strength of Silicon Nanostructures

June 3, 2013
Author(s)
Scott Grutzik, Brian G. Bush, Frank W. DelRio, Richard S. Gates, Melissa Hines, Alan Zehnder
The ability to accurately predict the strength of nanoscale, single crystal structures is critical in micro- and nano-electromechanical systems (MEMS and NEMS) design. Because of the small length scales involved failure does not always follow the same

High Confidence Level Calibration for AFM Based Fracture Testing of Nanobeams

June 11, 2012
Author(s)
Scott Grutzik, Richard S. Gates, Yvonne B. Gerbig, Robert F. Cook, Melissa Hines, Alan Zehnder
When designing micro- or nanoelectromechanical systems, (MEMS and NEMS), it is important to consider whether structural elements will withstand loads experienced during operation. Fracture behavior at length scales present in MEMS and NEMS is much di erent

Deformation and fracture of single-crystal silicon theta-like specimens

October 28, 2011
Author(s)
Michael S. Gaither, Frank W. DelRio, Richard S. Gates, Robert F. Cook
Miniaturized test specimens of single-crystal silicon, fabricated by lithography and deep reactive ion etching (DRIE), were used to measure deformation and fracture properties at the micro scale. Two specimen geometries, both in the form of a Greek letter

Prototype cantilevers for quantitative lateral force microscopy

September 27, 2011
Author(s)
Mark Reitsma, Richard S. Gates, Lawrence H. Friedman, Robert F. Cook
Prototype cantilevers that enable quantitative micro- to nano-scale surface force measurements using contact-mode atomic force microscopy (AFM) are presented. The “Hammerhead” cantilevers allow precise optical lever system calibrations for cantilever

Structure-property relationships for methyl-terminated alkyl self-assembled monolayers

July 20, 2011
Author(s)
Frank W. DelRio, Dave Rampulla, Cherno Jaye, Gheorghe Stan, Richard S. Gates, Daniel A. Fischer, Robert F. Cook
Structure-property relationships for methyl-terminated alkyl self-assembled monolayers (SAMs) are developed using near-edge X-ray absorption fine structure spectroscopy (NEXAFS) and atomic force microscopy (AFM). NEXAFS C K-edge spectra are used to compute

Strength distribution of single-crystal silicon theta-like specimens

May 18, 2010
Author(s)
Michael S. Gaither, Frank W. DelRio, Richard S. Gates, Edwin R. Fuller, Robert F. Cook
A new test specimen has been developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results

Theta-like specimen to determine tensile strength at the micro-scale

March 10, 2010
Author(s)
Michael S. Gaither, Frank W. DelRio, Richard S. Gates, Edwin R. Fuller, Robert F. Cook
Micro- and nano-electromechanical systems are typically formed via lithographic and etching processes that leave residual surface features, stresses, and chemistry that ultimately control component strength and device reliability. Here, we describe a new

Prototype Cantilevers for AFM Nanomechanical Property Measurement

October 2, 2009
Author(s)
Richard S. Gates, Mark Reitsma
Atomic Force Microscopy (AFM) is a widely used technique for imaging surfaces and measuring properties at the micro and nano-scales; however, the accuracy and precision of these measurements is hampered by the lack of suitable traceable standards and