Nanoscale Specific Heat Capacity Measurements Using Optoelectronic Bilayer Microcantilevers
Brian G. Burke, William A. Osborn, Richard S. Gates, David A. LaVan
We describe a new technique for optically and electrically detecting and heating bilayer microcantilevers (Pt−SiNx) to high temperatures at fast heating rates for nanoscale specific heat capacity measurements. The bilayer microcantilever acts simultaneously as a heater, temperature sensor, and mass sensor (0.01 ng resolution). The calibration of the system was validated for a mass of 0.72 ng by melting point and specific heat capacity measurements of deposited aluminum nanoparticles.